Process For Producing Radiation-Induced Self-Terminating Protective Coatings On A Substrate

A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.